By Cunge G   Bodart P   Brihoum M   Boulard F   Chevolleau T   Sadeghi N   in Plasma Sources Science and Technology

ISSN:0963-0252|21|2|24006-24014

IOP Publishing‎(2012)‎

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By Abautret J   Evirgen A   Perez J P   Laaroussi Y   Cordat A   Boulard F   Christol P   in Semiconductor Science and Technology

ISSN:0268-1242|30|6|65014-65022

IOP Publishing‎(2015)‎

Access to resources Favorite 6.222308