By San Haisheng   Li Lin   Li Gang   Chen Xuyuan   Feng Boxue   in Applied Physics B

ISSN:0946-2171|88|3|411-415

Springer Publishing Company ‎(2007)‎

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By San Haisheng   Zhang Hong   Zhang Qiang   Yu Yuxi   Chen Xuyuan   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|7|75020-75027

IOP Publishing‎(2013)‎

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By Zhou Peng   Chen Ranbin   Wang Na   San Haisheng   Chen Xuyuan   in Micromachines

ISSN:2072-666x|7|9|166-166

MDPI‎(2016)‎

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