By Charache G.   Egley J.   Depoy D.   Danielson L.   Freeman M.   Dziendziel R.   Moynihan J.   Baldasaro P.   Campbell B.   Wang C.   Choi H.   Turner G.   Wojtczuk S.   Colter P.   Sharps P.   Timmons M.   Fahey R.   Zhang K.   in Journal of Electronic Materials

ISSN:1543-186X|27|9|1038-1042

Springer Publishing Company ‎(1998)‎

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