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ISSN:1286-0042|5|1|85-89

Edp Sciences‎(2010)‎

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By Arnaud A   Boughaleb J   Monfray S   Boeuf F   Cugat O   Skotnicki T   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|10|104003-104015

IOP Publishing‎(2015)‎

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