By Schmolke R.   Deters R.   Thieme P.   Pech R.   Schwenk H.   Diakourakis G.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|4|413-418

Elsevier‎(2002)‎

Access to resources Favorite 6.10745

By Tu Y.L.   Zhang W.J.   Liu X.   Li W.   Chai C-L.   Deters R.   in International Journal of Critical Infrastructures

ISSN:1475-3219|4|3|274-295

Inderscience Publishers‎(2008)‎

Access to resources Favorite 5.690915