By Efremov A.M.   Kim D.-P.   Kim C.-I.   in Thin Solid Films

ISSN:0040-6090|435|1|232-237

Elsevier‎(2003)‎

Access to resources Favorite 8.913394

By Efremov A.M.   Kim D.-P.   Kim C.-I.   in Thin Solid Films

ISSN:0040-6090|435|1|83-88

Elsevier‎(2003)‎

Access to resources Favorite 8.913394

By Efremov A.M.   Kim D.-P.   Kim K.-T.   Kim C.-I.   in Microelectronic Engineering

ISSN:0167-9317|71|1|54-62

Elsevier‎(2004)‎

Access to resources Favorite 7.7624655

By Efremov A.M.   Kim D.P.   Kim K.T.   Kim C.I.   in Plasma Chemistry and Plasma Processing

ISSN:0272-4324|24|1|13-28

Springer Publishing Company ‎(2004)‎

Access to resources Favorite 1.5793761