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By Chang Chienliu Firouzi Kamyar Nikoozadeh Amin Yoon Hyo-Seon Vaithilingam Srikant Carver Thomas Khuri-Yakub Butrus T in Journal of Micromechanics and Microengineering
ISSN:0960-1317|24|8|85007-85019
IOP Publishing(2014)
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