By Dingeldein Joseph C   Walczak Karl A   Swatowski Brandon W   Friedrich Craig R   Middlebrook Christopher T   Roggemann Michael C   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|7|75015-75023

IOP Publishing‎(2013)‎

Access to resources Favorite 6.6142244