By Meyer M T   Subramanian S   Kim Y W   Ben-Yoav H   Gnerlich M   Gerasopoulos K   Bentley W E   Ghodssi R   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|9|95003-95012

IOP Publishing‎(2015)‎

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