By Chen Jinkai   Guo Hongwei   He Xingli   Wang Wenbo   Xuan Weipeng   Jin Hao   Dong Shurong   Wang Xiaozhi   Xu Yang   Lin Shisheng   Garner Sean   Luo Jikui   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|11|115005-115011

IOP Publishing‎(2015)‎

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