By Nomura Ken-ichi   Kusaka Yasuyuki   Ushijima Hirobumi   Nagase Kazuro   Ikedo Hiroaki   Mitsui Ryosuke   Takahashi Seiya   Nakajima Shin-ichiro   Iwata Shiro   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|9|95021-95027

IOP Publishing‎(2014)‎

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