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By Nomura Ken-ichi Kusaka Yasuyuki Ushijima Hirobumi Nagase Kazuro Ikedo Hiroaki Mitsui Ryosuke Takahashi Seiya Nakajima Shin-ichiro Iwata Shiro in Journal of Micromechanics and Microengineering
ISSN:0960-1317|24|9|95021-95027
IOP Publishing(2014)
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