By Won Yoonjin   Gao Yuan   Wardle Brian L   Xiang Rong   Maruyama Shigeo   Kenny Thomas W   Goodson Kenneth E   Won Yoonjin   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|11|115023-115029

IOP Publishing‎(2015)‎

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