By Goldowsky J   Mastrangeli M   Jacot-Descombes L   Gullo M R   Mermoud G   Brugger J   Martinoli A   Nelson B J   Knapp Helmut F   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|12|125026-125036

IOP Publishing‎(2013)‎

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