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Springer Publishing Company ‎(2007)‎

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By Kalkandjiev K   Riegger L   Kosse D   Welsche M   Gutzweiler L   Zengerle R   Koltay P   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|21|2|25008-25015

IOP Publishing‎(2011)‎

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