By Zeng K.   Liu Z.   Korvink J.G.   in Microsystem Technologies

ISSN:0946-7076|10|5|387-392

Springer Publishing Company ‎(2004)‎

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By Spengler N   Moazenzadeh A   Meier R Ch   Badilita V   Korvink J G   Wallrabe U   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|3|34004-34013

IOP Publishing‎(2014)‎

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By Meissner M V   Spengler N   Mager D   Wang N   Kiss S Z   Höfflin J   While P T   Korvink J G   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|6|65015-65023

IOP Publishing‎(2015)‎

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