By Higashiwaki Masataka   Sasaki Kohei   Murakami Hisashi   Kumagai Yoshinao   Koukitu Akinori   Kuramata Akito   Masui Takekazu   Yamakoshi Shigenobu   in Semiconductor Science and Technology

ISSN:0268-1242|31|3|34001-34011

IOP Publishing‎(2016)‎

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