By Zeimer Ute   Jeschke Joerg   Mogilatenko Anna   Knauer Arne   Kueller Viola   Hoffmann Veit   Kuhn Christian   Simoneit Tino   Martens Martin   Wernicke Tim   Kneissl Michael   Weyers Markus   in Semiconductor Science and Technology

ISSN:0268-1242|30|11|114008-114015

IOP Publishing‎(2015)‎

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