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By Higashiwaki Masataka Sasaki Kohei Murakami Hisashi Kumagai Yoshinao Koukitu Akinori Kuramata Akito Masui Takekazu Yamakoshi Shigenobu in Semiconductor Science and Technology
ISSN:0268-1242|31|3|34001-34011
IOP Publishing(2016)
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