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By Lullin Justine Bargiel Sylwester Lemoal Patrice Perrin Stéphane Albero Jorge Passilly Nicolas Froehly Luc Lardet-Vieudrin Franck Gorecki Christophe in Journal of Micromechanics and Microengineering
ISSN:0960-1317|25|11|115013-115024
IOP Publishing(2015)
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