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By Østergaard Peter Friis Lopacinska-Jørgensen Joanna Tommerup Niels Kristensen Anders Flyvbjerg Henrik Silahtaroglu Asli Marie Rodolphe Taboryski Rafael Østergaard Peter Friis in Journal of Micromechanics and Microengineering
ISSN:0960-1317|25|10|105002-105009
IOP Publishing(2015)
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