By Lu Yingxian   Wang Xiaohong   Wu Xiaoming   Qin Jin   Lu Ruochen   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|6|65010-65017

IOP Publishing‎(2014)‎

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ISSN:1286-0042|80|3|30901-30901

Edp Sciences‎(2018)‎

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