By Lieberman M A   Lichtenberg A J   Kawamura E   Marakhtanov A M   in Plasma Sources Science and Technology

ISSN:0963-0252|24|5|55011-55023

IOP Publishing‎(2015)‎

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By Marakhtanov M.K.   Marakhtanov A.M.   in Thin Solid Films

ISSN:0040-6090|359|2|127-135

Elsevier‎(2000)‎

Access to resources Favorite 2.512399