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Elsevier‎(1995)‎

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By Cao D.M.   Meng W.J.   Kelly K.W.   in Microsystem Technologies

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Springer Publishing Company ‎(2004)‎

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By Cao D.M.   Meng W.J.   Simko S.J.   Doll G.L.   Wang T.   Kelly K.W.   in Thin Solid Films

ISSN:0040-6090|429|1|46-54

Elsevier‎(2003)‎

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By Cao D. M.   Meng W. J.   in Microsystem Technologies

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Springer Publishing Company ‎(2004)‎

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