By Paesey J.   Kyler K.   Cronin W.   Mobley P.   Scrivner B.   Valocchi S.   Sue L.   Mohr J.   Monarch K.   Keller B.   Lai L.   in Journal of Electronic Materials

ISSN:1543-186X|25|11|1715-1724

Springer Publishing Company ‎(1996)‎

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