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By Zeimer Ute Jeschke Joerg Mogilatenko Anna Knauer Arne Kueller Viola Hoffmann Veit Kuhn Christian Simoneit Tino Martens Martin Wernicke Tim Kneissl Michael Weyers Markus in Semiconductor Science and Technology
ISSN:0268-1242|30|11|114008-114015
IOP Publishing(2015)
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