By Chang Chienliu   Moini Azadeh   Nikoozadeh Amin   Apte Nikhil   Zhuang Xuefeng   Khuri-Yakub Butrus T     in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|10|107002-107010

IOP Publishing‎(2014)‎

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