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By Morikaku Toshiyuki Kaibara Yoshinori Inoue Masatoshi Miura Takuya Suzuki Takaaki Oohira Fumikazu Inoue Shozo Namazu Takahiro in Journal of Micromechanics and Microengineering
ISSN:0960-1317|23|10|105016-105025
IOP Publishing(2013)
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