By Nallamuthu Punithavelan   Hwang Il-Han   Jeong Dae-Hun   Moon Seung-Hwan   Seo Seung-Wan   Lee Jong-Hyun   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|21|1|15018-15025

IOP Publishing‎(2011)‎

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