By Jung Howon   Kim Seok   Han Dandan   Jang Jinhee   Oh Seonghyeon   Choi Jun-Hyuk   Lee Eung-Sug   Hahn Jae W   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|5|55004-55010

IOP Publishing‎(2015)‎

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