By Pyo Soonjae   Lee Jae-Ik   Kim Min-Ook   Chung Taeyoung   Oh Yongkeun   Lim Soo-Chul   Park Joonah   Kim Jongbaeg   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|7|75012-75020

IOP Publishing‎(2014)‎

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