By Morikaku Toshiyuki   Kaibara Yoshinori   Inoue Masatoshi   Miura Takuya   Suzuki Takaaki   Oohira Fumikazu   Inoue Shozo   Namazu Takahiro   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|10|105016-105025

IOP Publishing‎(2013)‎

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