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By Pyo Soonjae Lee Jae-Ik Kim Min-Ook Chung Taeyoung Oh Yongkeun Lim Soo-Chul Park Joonah Kim Jongbaeg in Journal of Micromechanics and Microengineering
ISSN:0960-1317|24|7|75012-75020
IOP Publishing(2014)
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