By Wei Chuang   Qin Hantang   Ramírez-Iglesias Nakaira A   Chiu Chia-Pin   Lee Yuan-shin   Dong Jingyan   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|4|45010-45018

IOP Publishing‎(2014)‎

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