By Li Yue   Wu Ping   Luo Zhaofeng   Ren Yuxuan   Liao Meixiang   Feng Lili   Li Yuting   He Liqun   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|5|55020-55026

IOP Publishing‎(2015)‎

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