By Brandhoff Lukas   Zirath Helene   Salas Mariugenia   Haller Anna   Peham Johannes   Wiesinger-Mayr Herbert   Spittler Andreas   Schnetz Guntram   Lang Walter   Vellekoop Michael J   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|10|104001-104009

IOP Publishing‎(2015)‎

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