By Kumar Lalit   Reimann Klaus   Goossens Martijn J   Besling Willem F A   Dolleman Robin J   Pijnenburg Remco H W   Sarro Lina P M   Steeneken Peter G   Kumar Lalit   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|25|4|45011-45020

IOP Publishing‎(2015)‎

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