By Gerhardy C   Schomburg W K   Li J   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|7|75028-75032

IOP Publishing‎(2013)‎

Access to resources Favorite 12.004255

By Truckenmüller R.   Henzi P.   Herrmann D.   Saile V.   Schomburg W.K.   in Microsystem Technologies

ISSN:0946-7076|10|5|372-374

Springer Publishing Company ‎(2004)‎

Access to resources Favorite 2.0529134