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By Hajmirzaheydarali M Akbari M Soleimani-Amiri S Sadeghipari M Shahsafi A Farahani A Akhavan Mohajerzadeh S in Journal of Micromechanics and Microengineering
ISSN:0960-1317|25|7|74003-74008
IOP Publishing(2015)
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