By Bornholdt S   Itagaki N   Kuwahara K   Wulff H   Shiratani M   Kersten H   in Plasma Sources Science and Technology

ISSN:0963-0252|22|2|25019-25026

IOP Publishing‎(2013)‎

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By Shiratani M.   Koga K.   Watanabe Y.   in Thin Solid Films

ISSN:0040-6090|427|1|1-5

Elsevier‎(2003)‎

Access to resources Favorite 2.479079

By Takenaka K.   Shiratani M.   Onishi M.   Takeshita M.   Kinoshita T.   Koga K.   Watanabe Y.   in Materials Science in Semiconductor Processing

ISSN:1369-8001|5|2|301-304

Elsevier‎(2002)‎

Access to resources Favorite 1.6527194