By Murillo R.   Siekman M.   Bolhuis T.   Abelmann L.   Lodder J.   in Microsystem Technologies

ISSN:0946-7076|13|2|177-180

Springer Publishing Company ‎(2007)‎

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By Geerlings J   Sarajlic E   Berenschot J W   Siekman M H   Jansen H V   Abelmann L   Tas N R   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|10|105013-105028

IOP Publishing‎(2014)‎

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