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By Kumar Lalit Reimann Klaus Goossens Martijn J Besling Willem F A Dolleman Robin J Pijnenburg Remco H W Sarro Lina P M Steeneken Peter G Kumar Lalit in Journal of Micromechanics and Microengineering
ISSN:0960-1317|25|4|45011-45020
IOP Publishing(2015)
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