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By Berdova Maria Pirkkalainen Juha-Matti Sulkko Jaakko Song Xuefeng Hakonen Pertti J Sillanpää Mika A in Journal of Micromechanics and Microengineering
ISSN:0960-1317|23|12|125024-125028
IOP Publishing(2013)
Access to resources Favorite 9.685204