By Tofteberg Hannah R   Schjølberg-Henriksen Kari   Fasting Eivind J   Moen Alexander S   Taklo Maaike M V   Poppe Erik U   Simensen Christian J   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|8|84002-84009

IOP Publishing‎(2014)‎

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