By Pei Weihua   Zhao Hui   Zhao Shanshan   Fang Xiaolei   Chen Sanyuan   Gui Qiang   Tang Rongyu   Chen Yuanfang   Hong Bo   Gao Xiaorong   Chen Hongda   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|9|95015-95022

IOP Publishing‎(2014)‎

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