By Tomimatsu Yutaka   Takahashi Hidetoshi   Kobayashi Takeshi   Matsumoto Kiyoshi   Shimoyama Isao   Itoh Toshihiro   Maeda Ryutaro   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|23|12|125023-125029

IOP Publishing‎(2013)‎

Access to resources Favorite 8.478579