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By Uchiya Naoyuki Furuta Yusuke Nishikawa Hiroyuki Watanabe Tohru Haga Junji Satoh Takahiro Oikawa Masakazu Ishii Yasuyuki Kamiya Tomihiro in Microsystem Technologies
ISSN:0946-7076|14|9-11|1537-1540
Springer Publishing Company (2008)
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