By Torri G B   Janssen N M A   Zeng Z   Rottenberg X   Karabacak D M   Vandecasteele M   Van Hoof C   Puers R   Tilmans H A C   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|8|85014-85028

IOP Publishing‎(2014)‎

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