By Li Jia-dong   Cheng Jun-jie   Miao Bin   Wei Xiao-wei   Xie Jie   Zhang Jin-cheng   Zhang Zhi-qiang   Wu Dong-min   in Journal of Micromechanics and Microengineering

ISSN:0960-1317|24|7|75023-75028

IOP Publishing‎(2014)‎

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