Microsystem Technology

Author： Wolfgang Menz  

Publisher： John Wiley & Sons Inc‎

Publication year： 2008

E-ISBN: 9783527613014

P-ISBN(Hardback):  9783527296347

Subject： TB General Industrial Technology

Language： ENG

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Description

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Chapter

1 General Introduction to Microstructure Technology

pp.：  1 – 15

2 The Parallels to Microelectronics

pp.：  15 – 29

3 The Physical and Chemical Basics in Microtechnology

pp.：  29 – 59

4 Basic Technologies in MEMS

pp.：  59 – 123

5 Lithography

pp.：  123 – 185

6 Silicon Microsystem Technology

pp.：  185 – 223

7 The LIGA Process

pp.：  223 – 303

8 Alternative Processes of Microstructuring

pp.：  303 – 395

9 Packaging and Interconnecting Techniques (PIT)

pp.：  395 – 417

10 System Technology

pp.：  417 – 445

Literatur

pp.：  445 – 479

LastPages

pp.：  479 – 515

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